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MULTI-SOURCE LOW-POWER LOW-TEMPERATURE DEVICE AND METHOD FOR FORMING PLASMA POLYMERIZED COATING

Provided are a multi-source low-power low-temperature device and method for forming a plasma polymerized coating. The device comprises a main vacuum compartment (1), a carrier gas pipe (6) and a monomer vapor pipe (7). A plurality of discharge cavities (2) are arranged at a wall of the main vacuum compartment (1). A planar ground grid (3) and a porous electrode plate (4) are installed in each discharge cavity (2). The porous electrode plate (4) is parallel to and spaced apart from the grid (3), and is connected to a low-power high-frequency power supply (5). The carrier gas pipe (6) and the monomer vapor pipe (7) are respectively connected to the interior of each discharge cavity (2). A substrate (9) to be treated is placed inside the main vacuum compartment (1). The method comprises the following steps: turning on a vacuum pump; admitting a carrier gas and monomer vapor; and releasing, by a porous electrode plate (4), an electrical energy toward a wall of a discharge cavity (2), such that polymerization of the monomer vapor occurs, and a polymerized product sequentially passes through holes of the porous electrode plate (4) and a grid (3) to enter a main vacuum compartment (1) and deposit on a surface of a substrate (9) to form a polymeric coating. The method enables uniform spatial distribution of plasma, and has good uniformity of batch-processed products. Moreover, energy and density of the plasma are low, thereby preventing a chemical monomer structure from being excessively damaged, and ensuring good quality of polymeric coatings.


» Number: WO2018098979A1 (A1)

» Publication Date: 18//2/07/0

» Applicant: JIANGSU FAVORED NANOTECHNOLOGY CO LTD?[CN]

» Inventor: ZHONG JIAN?[CN]

» More Information

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This project has received funding from the European Union Seventh Framework Programme (FP7/2007-2013) under grant agreement n [310187].